Frequency-dependent Expression for Mutual Impedance per Unit Length of Interconnects on Lossy Semiconducting Substrate
نویسندگان
چکیده
Simple and accurate closed-form expressions for the frequency-dependent mutual inductance and resistance per unit length of coupled interconnects on lossy silicon substrate are presented. Based on the closed-form evaluation of the integral equations for the magnetic vector potential (taking into account the induced current density distribution inside silicon substrate), the closed-form expressions for the series impedance parameters are obtained. The validity of the proposed analytic solutions has been checked by a comparison with a quasi-TEM spectral domain approach and an equivalent-circuit modeling procedure.
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